SAN JOSE, Calif. — Novellus Systems Inc. moved to lower the cost of chemical mechanical planarization (CMP) Monday (June 21) by rolling out a 300-mm tool that it claimed could be used down to the ...

Novellus Systems Inc. says it has taken what was good about SpeedFam-IPEC's technology and fixed what wasn't with Xceda. The Silicon Valley-based back-end-of-line process tool vendor today unveiled ...