Through microphase separation, block copolymers (BCPs) can self-assemble into highly uniform, chemically distinct, periodic domains with dimensions and periods at scales of 3–200 nm 1,2 that are ...

Directed self-assembly (DSA) is a nanofabrication technique in which self-assembling block copolymer thin films (BCP) are ordered using larger-scale, pre-defined guides patterned by standard ...

There are still some problems to work out, such as cutting defect rates, but directed self-assembly has the potential to reduce the total number of masks. The upcoming 7nm process node presents tough ...