Austin, Texas — With the chip industry racing to develop immersion lithography for upcoming process generations, the Albany Nanotech research center has installed a 193-nanometer immersion scanner and ...

Nikon has this week announced the development of its new NSR-S636E ArF Immersion Scanner to provide industry-leading lithography solutions and enable customers to advance “semiconductor manufacturing ...

LOS ANGELES &#151 The three major scanner vendors announced plans for production-worthy 193-nm immersion tools here Tuesday (Jan. 27th) at the third Immersion Lithography Workshop, organized by ...