TOKYO--(BUSINESS WIRE)--Nikon Corporation has announced release of the NSR-S622D ArF immersion scanner to deliver world-class overlay and ultra-high productivity for the most demanding multiple ...

Austin, Texas — With the chip industry racing to develop immersion lithography for upcoming process generations, the Albany Nanotech research center has installed a 193-nanometer immersion scanner and ...

LONDON — ASML Holding NV has converted a Twinscan AT:1150 193-nm wavelength lithography system to accommodate a water bath and allow immersion lithography, the company said at a financial analysts' ...

Nikon has this week announced the development of its new NSR-S636E ArF Immersion Scanner to provide industry-leading lithography solutions and enable customers to advance “semiconductor manufacturing ...