This paper demonstrates the design and simulation of a 2-axis capacitive accelerometer. The design utilizes a simple comb structure to detect capacitance change with a minimum gap spacing of 0.9 μm.

Abstract: SummaryIn this work, we propose an innovative high-performance Micro-Electro-Mechanical Systems (MEMS) z-axis Frequency Modulation (FM) accelerometer able to achieve a sensitivity higher ...