IEEE

A crab leg suspension based dual axis MEMS accelerometer with low cross axis sensitivity

Abstract: This paper reports on the design and optimization of a 2-axis, single proof mass MEMS capacitive accelerometer, using the Inertial Measurement Unit (IMU) platform of GlobalFoundries. The ...
IEEE

A Bent-TBTF Resonant MEMS Accelerometer Using Auxiliary Supporting Beams

Abstract: This letter demonstrates a high-responsivity piezoelectric resonant MEMS accelerometer using a bent-TBTF resonator. Different from the conventional bent-beam resonant accelerometers, the ...