Abstract: We present a grid-type MEMS capacitive pressure sensor fabricated using a 0.18 μm 1P6M CMOS processes combined with a surface micromachining technique. The innovative grid-type sensor design ...
Abstract: This study proposes an innovative approach for fabricating a multiparameter sensor based on fiber Bragg gratings (FBGs) using 3-D printing technology. In this sensor design, three FBGs were ...
一些您可能无法访问的结果已被隐去。
显示无法访问的结果
反馈