COMSOL Multiphysics software lets you model just about anything from electromagnetic fields to structural mechanics and chemical reactions. While many of its capabilities fall outside the interest to ...

Abstract: To address the mutual constraints between sensitivity and operational bandwidth in the cilia MEMS vector hydrophone, this study proposes a dandelion-like composite materials ciliary ...

Abstract: Increasing the on-chip sensitivity of an accelerometer enhances the transduction efficiency at the sensor level, thereby improving the signal-to-noise ratio (SNR) without introducing ...

基于CMOS-SOI-MEMS平台的红外（IR）热传感器能够实现可扩展、低成本的热成像，但需对其光学、热学及机械性能协同优化。CMOS-SOI-MEMS（TMOS）红外传感器代表了非制冷型红外探测技术的突破性进展，其利用悬浮MOSFET作为传感元件，将红外辐射诱导的温度变化转换为 ...