CAS Key Laboratory of Magnetic Materials and Devices, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, P. R. China Zhejiang Province Key Laboratory ...

ANSYS(TM) FEM: #multiphysics #simulation of #MEMS-sensors based on #silicon with #piezoelectric thin-film layers and etched #quartz crystals ...

Department of Civil and Environmental Engineering, Clarkson University, Potsdam, New York 13699, United States Institute for a Sustainable Environment, Clarkson University, Potsdam, New York 13699, ...