† Department of Materials Science and Engineering, Yonsei University, 50 Yonsei-Ro, Seodaemun-Gu, Seoul, Korea 120-749 ‡ Department of Materials Science and Engineering, Pohang University of Science ...
Abstract: Micromachined silicon substrates have significantly reduced the heating power consumption of metal oxide (MOX) gas sensors. Specific applications, however, require further reductions far ...
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