The microfabricated sensor is constructed using silicon carbide as the substrate and aluminum nitride (AlN) as the piezoelectric film. The piezoelectric coefficient (d33) of AlN is measured using ...
Institute of Microelectronics (IME), Agency for Science, Technology and Research (A*STAR), 2 Fusionopolis Way, Innovis #08-02, Singapore 138634, Republic of Singapore ...
Based on multi-walled carbon nanotube (MWCNT)/cotton fabric (CF) piezoresistive sensor and polyvinylidene fluoride (PVDF) piezoelectric sensor, a dual-mode tactile sensor (MCP-DTS) featuring high ...
Centre for NanoHealth, College of Engineering, Swansea University, Swansea SA2 8PP, United Kingdom Leiden Institute of Chemistry, Universiteit Leiden, PO Box 9502, Leiden 2300 RA, Netherlands ...