Institute of Microelectronics (IME), Agency for Science, Technology and Research (A*STAR), 2 Fusionopolis Way, Innovis #08-02, Singapore 138634, Republic of Singapore ...

NEMS, or nanoelectromechanical systems, are devices in which the physical motion of a nanometre-scale structure is controlled by an electronic circuit, or vice versa. NEMS make particularly ...