Abstract: In this work, a piezoelectric-capacitive hybrid micromachined ultrasonic transducer (HMUT) with a high round-trip gain was developed to achieve superior pulse-echo imaging performance.

Abstract: This paper proposes a piezoelectric-capacitive hybrid micromachined ultrasonic transducer (HMUT). The operation mode of HMUT integrates piezoelectric torque and electrostatic forces on the ...