SEM images of a 3 × 2 array of laser-machined chunks. a) Top view. b) Sample tilted 54° and rotated. The FOV width is 2.3 mm for both images. Image Credit: Carl Zeiss Microscopy GmbH. Thinning and ...

A new technical paper titled “Scanning electron microscopy-based automatic defect inspection for semiconductor manufacturing: a systematic review” was published by researchers at KU Leuven and imec.