Abstract: This paper presents a systematic study on the development of Double Cantilever Beam (DCB) technique for Wafer-to-Wafer (W2W) bond energy (BE) measurement. The effect of dicing during DCB ...

Abstract: A cantilever ultrasonic motor with nanometer resolution is designed, fabricated, and tested in this article. Two orthogonal first bending vibration modes are used to form elliptical ...

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