IEEE

A $22 \mu \mathrm{g} /\sqrt{} \text{Hz}$ Noise Floor, $1.6 \text{mg} /\mathrm{g}^{2}$ VRC ...

Compared to state-of-the-art low noise MEMS accelerometers, this work improves the VRC and the FoM by 40x and 11.6x, respectively.