In this paper, we propose a novel piezoelectric micromachined ultrasonic transducer (PMUT) for airborne object detection, which provides high sensitivity compared to the conventional round-shaped PMUT ...

A bimorph piezoelectric micromachined ultrasound transducer (pMUT) is presented. The bimorph comprises molybdenum and aluminum nitride (AlN) layers in both the top and bottom sections of the device.