Abstract: This work reports a path-tracking control method based on tracking error constraints and integral guidance mechanisms with anti-interference for a robotic ...

Abstract: Achieving uniformity of patterns on photoresists is a significant challenge as process nodes get smaller. In practical production lines, the level sensor (LS) of the lithography system will ...

WHAT THIS STUDY ADDS This study provides the first national estimate of permanent morbidity and mortality resulting from diagnostic errors across all clinical settings, including both hospital-based ...