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中科光电无掩模单面光刻机DS-2000/14G
DS-2000/14G无掩模光刻机采用高精度DMD数字掩模与进口组件,分辨力达1μm,支持多种像素配置与曝光场尺寸,具备自动调焦与对准功能,适用于1-100mm样片,满足科研及微电子领域的高精度光刻需求。 .采用 DMD 作为数字掩模,像素数 1024×768 或 1920×1080 或 2560x1600 三 ...
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