Abstract: A single silicon island concave silicon microresonant pressure sensor based on frequency difference is proposed in this article. The resonator is designed for electrostatic drive and ...

Abstract: This study presents a highly sensitive wireless passive flexible pressure sensor. The sensor employs an ionic film as the dielectric layer, utilizes a spiral coil as the antenna for ...

The result is a pneumatic actuator built out of lasercut acetal parts. The mechanism consists of of two outer layers of plastic acting as the enclosure, and a cut-out middle layer which creates ...