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The Nature Index 2025 Research Leaders — previously known as Annual Tables — reveal the leading institutions and countries/territories in the natural and health sciences, according to their output in ...

Abstract: In this short review, the evolution of plasma etching technologies used in microelectronics fabrication since the discovery of the reactive ion etching process 50 years ago is explored.

An integrated circuit, commonly known as IC or just chip, is an entire electronic circuit made up of many separate components such as transistors, diodes, resistors, capacitors, and the conductive ...

Abstract: This article is a study about reactive ion etching as applied to etch substrate directionality, which is the important feature of RIE. The biosensors based on polysilicon material should be ...